Concept

Content of the study

Development of a high-density plasma source and its application to material processing

We believe that the development of a plasma source is the most important issue in reactive plasma research as a fundamental technology for material processing. This is because we believe that the development of an original plasma source and the realization of material processes that can only be realized with such a plasma source are essential to ensure Japan's international competitiveness as a "manufacturing nation. In our laboratory, we have been promoting research and development of plasma sources and their applications with a focus on "high-density plasma".

Development of reactive plasma measurement method

The development of a reactive plasma measurement method is important to advance the research and development of plasma processes from the conventional methodology of "trial-and-error" and "empirical" to the new methodology of "scientific and efficient" (smart process). In our laboratory, we have been promoting the development of plasma measurement methods mainly by optical methods, and in particular, we have an unparalleled track record in the development of laser spectroscopy. In the future, we would like to focus on the development of simple and industrially usable plasma monitoring technology.

Fundamental research on reactive plasma processing

Reactive plasmas are extremely diverse and complex, and a comprehensive understanding of them is not easy. However, in order for plasma technology to gain an honorary position in advanced industry, it needs to grow into a technology that is sufficiently controllable and can predict the performance of plasma processing by methods such as TCAD. In our laboratory, we would like to contribute to the development of plasma TCAD, etc. by elucidating fundamental processes in plasmas.

Plasma applied material processing

Plasma is the mainstay of today's materials processing, and more than 60% of the manufacturing processes for large-scale integrated circuits and flat panel displays are plasma-based. In our laboratory, we are investigating plasma process technology that can be used not only for the production of large-scale integrated circuits but also for the production of environmental devices.

Application of Plasma to Environmental Technolog

Non-equilibrium plasmas have the unique advantage of being able to induce a variety of chemical reaction processes at low temperatures that require very high temperatures in thermally equilibrium systems. Non-equilibrium plasmas are usually produced in a reduced pressure environment, but if non-equilibrium plasmas are produced at high pressures, such as atmospheric pressure, they can be expected to have a variety of applications not found in reduced pressure plasmas, while maintaining the characteristics of non-equilibrium plasmas described above. In our laboratory, the application of non-equilibrium atmospheric pressure plasmas to environmental engineering is being studied.

Research on laser ablation

Laser ablation is a technology to vaporize and plasmaize solid materials by irradiating them with high intensity laser light. This technology has been applied in a wide range of fields such as thin film creation, cluster generation, material processing, light sources, analysis, medicine, and energy, and is currently one of the most developed fields. The field is also a highly interdisciplinary one, as it is on the border of laser engineering, quantum electronics, materials engineering, plasma science and engineering, and fluid mechanics. In our laboratory, laser ablation plasmas are considered as a kind of high-density plasmas, and the experience in the field of reactive plasmas has been applied to the field of laser ablation. Translated with www.DeepL.com/Translator (free version)

Related research on fusion plasma

One of the ultimate problems that threatens the existence of humanity is the energy problem. Nuclear fusion is a dream technology that will fundamentally solve our energy problems. Up to now, fusion research has developed into a big science. On the other hand, this means that there are not many research themes in the field of nuclear fusion that can produce meaningful results in university laboratories. In our laboratory, we are studying a part of a fusion device called "divertor". The study of divertor plasmas is close to the study of reactive plasmas, and even university laboratories can produce impactful research results. Traditionally, in the field of nuclear fusion, the explanation has been that industrial applied plasmas have developed due to the spillover effect of research on fusion plasmas. In our laboratory, on the contrary, we are conducting research based on the concept of "spreading the research results of reactive plasmas to nuclear fusion".

Promotion of joint research

We would like to promote joint research with both private companies and public institutions. We have collaborated with a number of private companies and with the Fusion Science Institute. In the future, we would like to promote large-scale joint research, especially with private companies. Please feel free to contact us for more information.